photolithography

noun pho·to·li·thog·ra·phy \-li-ˈthä-grə-fē\

Definition of PHOTOLITHOGRAPHY

: lithography in which photographically prepared plates are used

: a process involving the photographic transfer of a pattern to a surface for etching (as in producing an integrated circuit)

— pho·to·lith·o·graph \-ˈli-thə-ˌgraf\ noun or transitive verb

— pho·to·lith·o·graph·ic \-ˌli-thə-ˈgra-fik\ adjective

— pho·to·lith·o·graph·i·cal·ly \-fi-k(ə-)lē\ adverb

International Scientific Vocabulary

First Known Use: 1856

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